Performance of CMOS-compatible Scandium AIN PMUT for imaging applications

Publication:

2019

Meeting abstract

Author(s)

;

;

;

Marigó, Eloi

;

Binti Roslan, Shazwani

;

;

Barniol, Nuria

;

Mazzalai, Andrea

;

Soundara-Pandian, Mohan

;

;

2078 since deposited on 2021-10-27

Acq. date: 2025-12-12