Publication:

Plasma etch chamber wall deposits – impact on etch species density and evaluation of cleaning procedures

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorDictus, Dries
dc.contributor.authorShamiryan, Denis
dc.contributor.authorParaschiv, Vasile
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorVinckier, Chris
dc.contributor.imecauthorDictus, Dries
dc.contributor.imecauthorParaschiv, Vasile
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDictus, Dries::0000-0002-7896-1747
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-17T21:59:06Z
dc.date.available2021-10-17T21:59:06Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/15238
dc.source.beginpagePS2-ThA11
dc.source.conferenceAVS 56th International Symposium & Exhibition
dc.source.conferencedate8/11/2009
dc.source.conferencelocationSan Jose, CA USA
dc.title

Plasma etch chamber wall deposits – impact on etch species density and evaluation of cleaning procedures

dc.typeMeeting abstract
dspace.entity.typePublication
Files

Original bundle

Name:
19097.pdf
Size:
108.5 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions