Publication:
Double patterning lithography for 32 nm: critical dimensions uniformity and overlay control considerations
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1986 since deposited on 2021-10-17
2last month
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Acq. date: 2026-01-10
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Views
1986 since deposited on 2021-10-17
2last month
1last week
Acq. date: 2026-01-10
Citations