Publication:
Temperature Compensated Differential Pressure Sensor Based on a Glass Membrane With Femtosecond Laser Written Bragg Gratings
| dc.contributor.author | Geudens, Viktor | |
| dc.contributor.author | Van Steenberge, Geert | |
| dc.contributor.author | Missinne, Jeroen | |
| dc.contributor.imecauthor | Geudens, Viktor | |
| dc.contributor.imecauthor | Van Steenberge, Geert | |
| dc.contributor.imecauthor | Missinne, Jeroen | |
| dc.contributor.orcidimec | Geudens, Viktor::0000-0002-6081-6867 | |
| dc.contributor.orcidimec | Van Steenberge, Geert::0000-0001-8574-1235 | |
| dc.contributor.orcidimec | Missinne, Jeroen::0000-0002-3470-620X | |
| dc.date.accessioned | 2024-11-26T09:26:33Z | |
| dc.date.available | 2024-09-29T18:03:40Z | |
| dc.date.available | 2024-11-26T09:26:33Z | |
| dc.date.issued | 2024 | |
| dc.description.wosFundingText | This work was supported by the Research Foundation - Flanders (FWO) under Grant G021821N. | |
| dc.identifier.doi | 10.1109/JSEN.2024.3411096 | |
| dc.identifier.issn | 1530-437X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/44585 | |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC | |
| dc.source.beginpage | 23773 | |
| dc.source.endpage | 23780 | |
| dc.source.issue | 15 | |
| dc.source.journal | IEEE SENSORS JOURNAL | |
| dc.source.numberofpages | 8 | |
| dc.source.volume | 24 | |
| dc.title | Temperature Compensated Differential Pressure Sensor Based on a Glass Membrane With Femtosecond Laser Written Bragg Gratings | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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