Publication:

Replacing SiO2 - Material and processing aspects of new dielectrics

Date

2008
Meeting abstract
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dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorAdelmann, Christoph
dc.contributor.authorDelabie, Annelies
dc.contributor.authorNyns, Laura
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-17T06:43:40Z
dc.date.available2021-10-17T06:43:40Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/13598
dc.source.beginpage695
dc.source.conference213th ECS Meeting
dc.source.conferencedate19/05/2008
dc.source.conferencelocationPhoenix, AZ USA
dc.title

Replacing SiO2 - Material and processing aspects of new dielectrics

dc.typeMeeting abstract
dspace.entity.typePublication
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