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Rapid thermal oxidation of porous silicon for surface passivation
Publication:
Rapid thermal oxidation of porous silicon for surface passivation
Date
1998
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Debarge, L.
;
Stoquert, J. P.
;
Slaoui, A.
;
Stalmans, Lieven
;
Poortmans, Jef
Journal
Materials Science in Semiconductor Processing
Abstract
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1898
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations
Metrics
Views
1898
since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations