Publication:
Reliability of ultra-thin oxides for the giga-bit generations
Date
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Nigam, Tanya | |
| dc.contributor.author | Kaczer, Ben | |
| dc.contributor.author | Maes, Herman | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Kaczer, Ben | |
| dc.contributor.orcidimec | Kaczer, Ben::0000-0002-1484-4007 | |
| dc.date.accessioned | 2021-10-06T11:14:19Z | |
| dc.date.available | 2021-10-06T11:14:19Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3476 | |
| dc.source.beginpage | 72 | |
| dc.source.conference | ESSDERC'99 - Proceedings of the 29th European Solid-State Device Research Conference | |
| dc.source.conferencedate | 13/09/1999 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.source.endpage | 80 | |
| dc.title | Reliability of ultra-thin oxides for the giga-bit generations | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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