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Atomistic modeling of pocket dopant deactivation and its impact on Vth variation in scaled Si planar devices using an atomistic kinetic Monte Carlo approach
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Atomistic modeling of pocket dopant deactivation and its impact on Vth variation in scaled Si planar devices using an atomistic kinetic Monte Carlo approach
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Date
2015
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Noda, Taiji
;
Vrancken, Christa
;
Vandervorst, Wilfried
;
Horiguchi, Naoto
Journal
IEEE Transactions on Electron Devices
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1932
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations
Metrics
Views
1932
since deposited on 2021-10-22
Acq. date: 2025-12-10
Citations