Electron beam metrology for advanced technology nodes

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Author(s)

;

Horiguchi, Naoto

;

Boemmels, Juergen

;

;

Van den Bosch, Geert

;

Kar, Gouri Sankar

;

Ohashi, Takeyoshi

;

Sutani, Takumichi

;

Watanabe, Ryota

;

Takemasa, Yoshikata

;

Journal

Japanese Journal of Applied Physics

Metrics

1954 since deposited on 2021-10-27

Acq. date: 2025-10-23