Publication:

Silicate formation and thermal stability of rare earth oxides as high-k gate dielectrics

Date

2008

Journal article

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Author(s)

Van Elshocht, Sven

;

Adelmann, Christoph

;

Conard, Thierry

;

Delabie, Annelies

;

Franquet, Alexis

;

;

Richard, Olivier

;

;

;

De Gendt, Stefan

Journal

Journal of Vacuum Science and Technology A

Statistics

1814 since deposited on 2021-10-17

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Acq. date: 2026-10-05