Publication:

High resolution electrical characterization of advanced CMOS devices

Date

2004
Proceedings Paper
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dc.contributor.authorEyben, Pierre
dc.contributor.authorPetry, Jasmine
dc.contributor.authorJanssens, Tom
dc.contributor.authorFukutome, H.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-15T13:23:28Z
dc.date.available2021-10-15T13:23:28Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8897
dc.source.beginpageS4-3-76
dc.source.conferenceSeeing at the Nanoscale II
dc.source.conferencedate13/10/2004
dc.source.conferencelocationGrenoble France
dc.title

High resolution electrical characterization of advanced CMOS devices

dc.typeProceedings paper
dspace.entity.typePublication
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