Publication:
Pre ALD cleaning
Date
| dc.contributor.author | Delabie, Annelies | |
| dc.contributor.imecauthor | Delabie, Annelies | |
| dc.date.accessioned | 2021-10-18T15:58:18Z | |
| dc.date.available | 2021-10-18T15:58:18Z | |
| dc.date.issued | 2010 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/17001 | |
| dc.source.conference | 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS | |
| dc.source.conferencedate | 19/09/2010 | |
| dc.source.conferencelocation | Oostende Belgium | |
| dc.title | Pre ALD cleaning | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |