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Recent progress in sequential 3D device stacking: low temperature reliable top tier junction-less devices on 300mm wafers
Publication:
Recent progress in sequential 3D device stacking: low temperature reliable top tier junction-less devices on 300mm wafers
Date
2019
Proceedings Paper
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42317.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vandooren, Anne
;
Franco, Jacopo
;
Wu, Zhicheng
;
Parvais, Bertrand
;
Besnard, Guillaume
;
Schwarzenbach, Walter
;
Radu, Ionut
;
Nguyen, Bich-Yen
;
Collaert, Nadine
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Abstract
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1906
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations
Metrics
Views
1906
since deposited on 2021-10-27
Acq. date: 2025-10-23
Citations