Publication:
A novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonators
Date
| dc.contributor.author | Kalicinski, Stanislaw | |
| dc.date.accessioned | 2021-10-16T17:01:45Z | |
| dc.date.available | 2021-10-16T17:01:45Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12380 | |
| dc.source.conference | Nanotimer Workshop on Micro- and Nano-Mechanical Resonators | |
| dc.source.conferencedate | 3/12/2007 | |
| dc.source.conferencelocation | Cambridge UK | |
| dc.title | A novel method to determine the mechanical resonance frequency, quality factor and charging of electrostatically actuated micromechanical resonators | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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