Publication:
Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe
Date
| dc.contributor.author | Caymax, Matty | |
| dc.contributor.author | Leong, W. Y. | |
| dc.contributor.editor | Nijs, Johan | |
| dc.contributor.imecauthor | Caymax, Matty | |
| dc.date.accessioned | 2021-09-29T12:40:06Z | |
| dc.date.available | 2021-09-29T12:40:06Z | |
| dc.date.issued | 1994 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/73 | |
| dc.source.beginpage | 141 | |
| dc.source.book | Advanced Silicon and Semiconducting Silicon Alloy-Based Materials and Devices | |
| dc.source.endpage | 183 | |
| dc.title | Low Thermal Budget Chemical Vapour Deposition Techniques for Si and SiGe | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | ||
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