Publication:

High efficiency low temperature pre-epi clean method for advanced group IV epi processing

Date

2012
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorMachkaoutsan, Vladimir
dc.contributor.authorWeeks, Doran
dc.contributor.authorBauer, Matthias
dc.contributor.authorMaes, Jan
dc.contributor.authorTolle, John
dc.contributor.authorThomas, Shawn
dc.contributor.authorAlian, AliReza
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorLoo, Roger
dc.contributor.imecauthorMachkaoutsan, Vladimir
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorAlian, AliReza
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorLoo, Roger
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.date.accessioned2021-10-20T13:02:48Z
dc.date.available2021-10-20T13:02:48Z
dc.date.embargo9999-12-31
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/21071
dc.source.beginpage339
dc.source.conferenceSiGe, Ge, and Related Compunds 5: Materials, Processing, and Devices
dc.source.conferencedate7/10/2012
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage348
dc.title

High efficiency low temperature pre-epi clean method for advanced group IV epi processing

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
25542.pdf
Size:
190.18 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions