Publication:
0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications
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2352 since deposited on 2021-10-17
4last month
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Acq. date: 2025-12-04
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Views
2352 since deposited on 2021-10-17
4last month
1last week
Acq. date: 2025-12-04
Citations