Publication:

0.5 nm EOT low leakage ALD SrTiO3 on TiN MIM capacitors for DRAM applications

Date

2008
Proceedings Paper
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Author(s)

Menou, Nicolas
;
Wang, Xin Peng
;
Kaczer, Ben  
;
Polspoel, Wouter
;
Popovici, Mihaela Ioana  
;
Opsomer, Karl  
;
Pawlak, Malgorzata
;
Knaepen, W.
;
Detavernier, C.
;
Blomberg, T.
;
Pierreux, D.
;
Swerts, Johan  
;
Maes, Jan  
;
Favia, Paola  
;
Bender, Hugo  
;
Brijs, Bert
;
Vandervorst, Wilfried  
;
Van Elshocht, Sven  
;
Wouters, Dirk
;
Biesemans, Serge  
;
Kittl, Jorge

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2358 since deposited on 2021-10-17
Acq. date: 2026-03-17

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