Publication:

Interface and defect control for group IV channel engineering

Date

2008
Proceedings Paper
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dc.contributor.authorSakai, Akira
dc.contributor.authorOhara, Yuji
dc.contributor.authorUeda, Takaya
dc.contributor.authorToyoda, Eiji
dc.contributor.authorIzunome, Koji
dc.contributor.authorTakeuchi, Shotaro
dc.contributor.authorShimura, Yosuke
dc.contributor.authorNakatsuka, Osamu
dc.contributor.authorOgawa, Masaki
dc.contributor.authorZaima, Shigeaki
dc.contributor.authorKimura, Shigeru
dc.date.accessioned2021-10-17T10:23:37Z
dc.date.available2021-10-17T10:23:37Z
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14411
dc.source.beginpage687
dc.source.conferenceSiGe, Ge, and Related Compounds 3: Materials, Processing, and Devices
dc.source.conferencedate12/10/2008
dc.source.conferencelocationHonolulu, HI USA
dc.source.endpage698
dc.title

Interface and defect control for group IV channel engineering

dc.typeProceedings paper
dspace.entity.typePublication
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