Publication:
The first observation of p-type electromigration failure in full ruthenium interconnects
Date
| dc.contributor.author | Beyne, Sofie | |
| dc.contributor.author | Dutta, Shibesh | |
| dc.contributor.author | Varela Pedreira, Olalla | |
| dc.contributor.author | Bosman, Niels | |
| dc.contributor.author | Adelmann, Christoph | |
| dc.contributor.author | De Wolf, Ingrid | |
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | Croes, Kristof | |
| dc.contributor.imecauthor | Beyne, Sofie | |
| dc.contributor.imecauthor | Varela Pedreira, Olalla | |
| dc.contributor.imecauthor | Adelmann, Christoph | |
| dc.contributor.imecauthor | De Wolf, Ingrid | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | Croes, Kristof | |
| dc.contributor.orcidimec | Adelmann, Christoph::0000-0002-4831-3159 | |
| dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
| dc.contributor.orcidimec | Croes, Kristof::0000-0002-3955-0638 | |
| dc.date.accessioned | 2021-10-25T16:44:00Z | |
| dc.date.available | 2021-10-25T16:44:00Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/30243 | |
| dc.identifier.url | https://ieeexplore.ieee.org/document/8353638/ | |
| dc.source.beginpage | 6D.7-1 | |
| dc.source.conference | IEEE International Reliability Physics Symposium - IRPS | |
| dc.source.conferencedate | 11/03/2018 | |
| dc.source.conferencelocation | Burlingame, CA USA | |
| dc.source.endpage | 6D.7-9 | |
| dc.title | The first observation of p-type electromigration failure in full ruthenium interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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