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Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process
Publication:
Selectivity process control using in-line XPS for self-assembly monolayer-based selective deposition process
Date
2018
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Armini, Silvia
;
Herregods, Sebastiaan
;
Tokei, Zsolt
;
Charley, Anne-Laure
;
Leray, Philippe
;
Lee, Wei Ti
;
Larson, Tom
;
Figueiro, Nivea
;
Koret, Roy
;
Wolfling, Shay
Journal
Abstract
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1940
since deposited on 2021-10-25
441
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1940
since deposited on 2021-10-25
441
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations