Publication:

Self-patterned ultra-sharp diamond tips and their application for advanced nanoelectronics device characterization by electrical SPM

Date

2023
Journal article
https://doi.org/10.1016/j.mne.2023.100195
Simple item page Full metadata Statistics
 
dc.contributor.authorWouters, Lennaert
dc.contributor.authorBoehme, Thijs
dc.contributor.authorMana, Luca
dc.contributor.authorHantschel, Thomas
dc.contributor.imecauthorWouters, Lennaert
dc.contributor.imecauthorBoehme, Thijs
dc.contributor.imecauthorMana, Luca
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.orcidimecWouters, Lennaert::0000-0002-6730-9542
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2023-11-28T07:53:46Z
dc.date.available2023-08-20T18:03:13Z
dc.date.available2023-11-28T07:53:46Z
dc.date.embargo2023-06-01
dc.date.issued2023
dc.identifier.doi10.1016/j.mne.2023.100195
dc.identifier.issn2590-0072
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42367
dc.publisherELSEVIER
dc.source.beginpageArt. 100195
dc.source.endpagena
dc.source.issueJune
dc.source.journalMICRO AND NANO ENGINEERING
dc.source.numberofpages5
dc.source.volume19
dc.subject.keywordsSILICON
dc.subject.keywordsDEPOSITION
dc.subject.keywordsRESOLUTION
dc.subject.keywordsDOPANT
dc.subject.keywordsPROBES
dc.title

Self-patterned ultra-sharp diamond tips and their application for advanced nanoelectronics device characterization by electrical SPM

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
1-s2.0-S2590007223000254-main.pdf
Size:
3.86 MB
Format:
Adobe Portable Document Format
Description:
Published version
Download
Publication available in collections:
Articles