Publication:
Metal film characterization with qualified spreading resistance
Date
| dc.contributor.author | Clarysse, Trudo | |
| dc.contributor.author | Hoflijk, Ilse | |
| dc.contributor.author | Zhang, Wenqi | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Hoflijk, Ilse | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-15T12:53:51Z | |
| dc.date.available | 2021-10-15T12:53:51Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/8697 | |
| dc.source.beginpage | 444 | |
| dc.source.endpage | 449 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science and Technology B | |
| dc.source.volume | 22 | |
| dc.title | Metal film characterization with qualified spreading resistance | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |