Publication:
Influence of CH4H2 reactive ion etching on the electrical and optical properties of AlGaAs/InGaAs/GaAs heterostructures
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
2036 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-15
Citations
Metrics
Views
2036 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-15
Citations