Publication:

Study of CoSi2 formation from a Co-Ni alloy

Date

2002
Journal article
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dc.contributor.authorChamirian, Oxana
dc.contributor.authorSteegen, An
dc.contributor.authorBender, Hugo
dc.contributor.authorLauwers, Anne
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorMarabelli, F.
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorLauwers, Anne
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-14T21:13:10Z
dc.date.available2021-10-14T21:13:10Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6091
dc.source.beginpage221
dc.source.endpage230
dc.source.issue1_2
dc.source.journalMicroelectronic Engineering
dc.source.volume60
dc.title

Study of CoSi2 formation from a Co-Ni alloy

dc.typeJournal article
dspace.entity.typePublication
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