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Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies

Date

1999
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dc.contributor.authorLauwers, A.
dc.contributor.authorBesser, Paul
dc.contributor.authorGutt, T.
dc.contributor.authorSatta, Alessandra
dc.contributor.authorde Potter de ten Broeck, Muriel
dc.contributor.authorLindsay, Richard
dc.contributor.authorRoelandts, Nico
dc.contributor.authorLoosen, Fred
dc.contributor.authorStucchi, Michele
dc.contributor.authorVrancken, Christa
dc.contributor.authorDeweerdt, Bruno
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorBesser, Paul
dc.contributor.imecauthorde Potter de ten Broeck, Muriel
dc.contributor.imecauthorLoosen, Fred
dc.contributor.imecauthorStucchi, Michele
dc.contributor.imecauthorVrancken, Christa
dc.contributor.imecauthorDeweerdt, Bruno
dc.contributor.imecauthorMaex, Karen
dc.date.accessioned2021-10-06T11:41:53Z
dc.date.available2021-10-06T11:41:53Z
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3612
dc.source.conferenceEuropean Workshop Materials for Advanced Metallization; March 8-10, 1999; Oostende, Belgium.
dc.title

Comparative study of Ni-silicide and Co-silicide for sub 0.25 μm technologies

dc.typeOral presentation
dspace.entity.typePublication
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