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High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Publication:
High resolution scanning spreading resistance microscopy of fully depleted silicon-on-insulator devices and double-gate transistors
Date
2003
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Alvarez, David
;
Fouchier, Marc
;
Hartwich, J.
;
Eyben, Pierre
;
Vandervorst, Wilfried
Journal
Abstract
Description
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1993
since deposited on 2021-10-15
421
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1993
since deposited on 2021-10-15
421
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations