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UV-induced modification of fluorocarbon polymer: effect of treatment atmosphere and aging on dissolution in organic solvent

Date

2013
Proceedings Paper
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dc.contributor.authorLe, Quoc Toan
dc.contributor.authorKesters, Els
dc.contributor.authorConard, Thierry
dc.contributor.authorStruyf, Herbert
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorLe, Quoc Toan
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecLe, Quoc Toan::0000-0002-0206-6279
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-21T09:08:51Z
dc.date.available2021-10-21T09:08:51Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/22654
dc.source.beginpage132
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XI - UCPSS
dc.source.conferencedate17/09/2012
dc.source.conferencelocationGent Belgium
dc.source.endpage135
dc.title

UV-induced modification of fluorocarbon polymer: effect of treatment atmosphere and aging on dissolution in organic solvent

dc.typeProceedings paper
dspace.entity.typePublication
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