Publication:
Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors
Date
| dc.contributor.author | Menou, M. | |
| dc.contributor.author | Turquat, Ch. | |
| dc.contributor.author | Madigou, V. | |
| dc.contributor.author | Muller, Ch. | |
| dc.contributor.author | Goux, Ludovic | |
| dc.contributor.author | Lisoni, Judit | |
| dc.contributor.author | Schwitters, Michael | |
| dc.contributor.author | Wouters, Dirk | |
| dc.contributor.imecauthor | Goux, Ludovic | |
| dc.contributor.orcidimec | Goux, Ludovic::0000-0002-1276-2278 | |
| dc.date.accessioned | 2021-10-16T03:24:23Z | |
| dc.date.available | 2021-10-16T03:24:23Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10880 | |
| dc.source.beginpage | 073502-1 | |
| dc.source.endpage | 073502-3 | |
| dc.source.issue | 7 | |
| dc.source.journal | Applied Physics Letters | |
| dc.source.volume | 87 | |
| dc.title | Sidewalls contribution in integrated three-dimensional Sr0.8Bi2.2Ta2O9-based ferroelectric capacitors | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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