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Improved LOCOS isolation for ultra thin 0.18 μm fully-depleted SOI CMOS
Publication:
Improved LOCOS isolation for ultra thin 0.18 μm fully-depleted SOI CMOS
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Date
2001
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
van Meer, Hans
;
De Meyer, Kristin
Journal
Abstract
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1923
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Views
1923
since deposited on 2021-10-14
1
last month
1
last week
Acq. date: 2025-12-16
Citations