Publication:
Seeing through the haze: process monitoring and qualification using comprehensive surface data
Date
| dc.contributor.author | Holsteyns, Frank | |
| dc.contributor.author | Roels, J. | |
| dc.contributor.author | Le, Quoc Toan | |
| dc.contributor.author | Kenis, Karine | |
| dc.contributor.author | Mertens, Paul | |
| dc.contributor.imecauthor | Holsteyns, Frank | |
| dc.contributor.imecauthor | Le, Quoc Toan | |
| dc.contributor.imecauthor | Kenis, Karine | |
| dc.contributor.imecauthor | Mertens, Paul | |
| dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
| dc.date.accessioned | 2021-10-15T13:53:26Z | |
| dc.date.available | 2021-10-15T13:53:26Z | |
| dc.date.issued | 2004 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9048 | |
| dc.source.beginpage | 50 | |
| dc.source.endpage | 54 | |
| dc.source.issue | 1 | |
| dc.source.journal | Yield Management Solutions | |
| dc.source.volume | 6 | |
| dc.title | Seeing through the haze: process monitoring and qualification using comprehensive surface data | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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