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High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond
Publication:
High Aspect Ratio Supervia Dual Damascene etch for iN5 and beyond
Date
2021
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Puliyalil, Harinarayanan
;
Feurprier, Yannick
;
Oikawa, Noriaki
;
Vega Gonzalez, Victor
;
Briggs, Basoene
;
Montero Alvarez, Daniel
;
Lazzarino, Frederic
;
Tokei, Zsolt
;
Satoru, Nakamura
;
Tahara, Shigeru
;
Kumar, Kaushik
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Abstract
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2023
since deposited on 2021-10-31
Acq. date: 2025-10-23
Citations
Metrics
Views
2023
since deposited on 2021-10-31
Acq. date: 2025-10-23
Citations