Publication:
Interconnect scaling for10nm and beyond
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.date.accessioned | 2021-10-20T16:58:42Z | |
| dc.date.available | 2021-10-20T16:58:42Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2012 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/21615 | |
| dc.source.conference | AVS 59th International Symposium and Exhibition | |
| dc.source.conferencedate | 29/10/2012 | |
| dc.source.conferencelocation | Tampa, FL USA | |
| dc.title | Interconnect scaling for10nm and beyond | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |