Publication:

World-wide standardization effort on leaching measurement methodology

Date

2007
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorGronheid, Roel
dc.contributor.authorBaerts, Christina
dc.contributor.authorCaporalo, Stefan
dc.contributor.authorAlexander, Jim
dc.contributor.authorRathsack, Ben
dc.contributor.authorScheer, Steven
dc.contributor.authorOhmori, Katsumi
dc.contributor.authorRice, Bryan
dc.contributor.imecauthorGronheid, Roel
dc.contributor.imecauthorBaerts, Christina
dc.contributor.imecauthorScheer, Steven
dc.date.accessioned2021-10-16T16:24:33Z
dc.date.available2021-10-16T16:24:33Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12231
dc.source.conference4th International Symposium on Immersion Lithography
dc.source.conferencedate8/10/2007
dc.source.conferencelocationKeystone, CO USA
dc.title

World-wide standardization effort on leaching measurement methodology

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions