Publication:

Development on main chain scission resists for high-NA EUV lithography

Date

2023

Proceedings Paper

https://doi.org/10.1117/12.2657506

Simple item page Full metadata Statistics

Author(s)

Shirotori, Akihide

;

Hoshino, Manabu

;

Fujimura, Makoto

;

;

;

De Simone, Danilo

;

Vandenberghe, Geert

;

Sanuki, Hideaki

Journal

Proceedings of SPIE

Statistics

848 since deposited on 2023-07-28

1last month

Acq. date: 2026-04-07