Publication:

Development on main chain scission resists for high-NA EUV lithography

Date

2023
Proceedings Paper
https://doi.org/10.1117/12.2657506
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Author(s)

Shirotori, Akihide
;
Hoshino, Manabu
;
Fujimura, Makoto
;
Yeh, Sin Fu
;
Suh, Hyo Seon  
;
De Simone, Danilo  
;
Vandenberghe, Geert  
;
Sanuki, Hideaki

Journal

Proceedings of SPIE

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843 since deposited on 2023-07-28
Acq. date: 2025-10-26

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843 since deposited on 2023-07-28
Acq. date: 2025-10-26

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