Publication:

Imaging semiconductor patterns at N10 logic node with a high-throughput multi-beam SEM

Date

2016

Meeting abstract

Simple item page Full metadata Statistics

Files

34647.pdf 585.84 KB

Author(s)

;

;

;

Leray, Philippe

;

;

Statistics

1846 since deposited on 2021-10-23

Acq. date: 2026-06-26