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Experimental study and optimization of scanning capacitance microscopy for two-dimensional carrier profiling of submicron semiconductor devices

Date

2006
Dissertation
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cris.virtual.department#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtual.orcid#PLACEHOLDER_PARENT_METADATA_VALUE#
cris.virtualsource.departmentce0f72bd-4108-4e8f-b7e0-9b224d52f414
cris.virtualsource.orcidce0f72bd-4108-4e8f-b7e0-9b224d52f414
dc.contributor.advisorVandervorst, W.
dc.contributor.authorDuhayon, Natasja
dc.date.accessioned2026-06-11T15:10:09Z
dc.date.available2026-06-11T15:10:09Z
dc.date.issued2006
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/59671
dc.provenance.editstepusermeghan.oneill@imec.be
dc.title

Experimental study and optimization of scanning capacitance microscopy for two-dimensional carrier profiling of submicron semiconductor devices

dc.typePHD thesis
dspace.entity.typePublication
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