Publication:

Reliability challenges for barrier/liner system in high aspect ratio through silicon vias

Date

2014

Journal article

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Author(s)

;

Van Huylenbroeck, Stefaan

;

Van Besien, Els

;

;

;

Stucchi, Michele

;

;

;

De Wolf, Ingrid

;

Journal

Microelectronics Reliability

Statistics

1812 since deposited on 2021-10-22

Acq. date: 2026-02-26