Publication:

CMOS-integrated SiGe MEMS: application to micro-mirror arrays

Date

2009
Proceedings Paper
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dc.contributor.authorWitvrouw, Ann
dc.contributor.authorBeyne, Eric
dc.contributor.authorHaspeslagh, Luc
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorHaspeslagh, Luc
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-18T05:22:28Z
dc.date.available2021-10-18T05:22:28Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16554
dc.source.beginpage734
dc.source.conferenceTransducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems
dc.source.conferencedate21/06/2009
dc.source.conferencelocationDenver, CO USA
dc.source.endpage739
dc.title

CMOS-integrated SiGe MEMS: application to micro-mirror arrays

dc.typeProceedings paper
dspace.entity.typePublication
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