Publication:

Lossless solvent-based extension implant strip

Date

2009
Proceedings Paper
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dc.contributor.authorVos, Rita
dc.contributor.authorMannaert, Geert
dc.contributor.authorHalder, Sandip
dc.contributor.authorWada, Masayuki
dc.contributor.authorSonnemans, Roger
dc.contributor.authorTsvetanova, Diana
dc.contributor.authorValckx, Nick
dc.contributor.authorVanstreels, Kris
dc.contributor.authorConard, Thierry
dc.contributor.authorMertens, Paul
dc.contributor.imecauthorVos, Rita
dc.contributor.imecauthorMannaert, Geert
dc.contributor.imecauthorHalder, Sandip
dc.contributor.imecauthorTsvetanova, Diana
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorMertens, Paul
dc.contributor.orcidimecHalder, Sandip::0000-0002-6314-2685
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.date.accessioned2021-10-18T05:02:06Z
dc.date.available2021-10-18T05:02:06Z
dc.date.embargo9999-12-31
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16508
dc.source.beginpage179
dc.source.conferenceCleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11
dc.source.conferencedate4/10/2009
dc.source.conferencelocationVienna Austria
dc.source.endpage186
dc.title

Lossless solvent-based extension implant strip

dc.typeProceedings paper
dspace.entity.typePublication
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