Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

Van Daele, Michiel; Griffiths, Matthew B.E.; Raza, Ali; Minjauw, Matthias M.; Solano, Eduardo; Feng, Ji-Yu; Ramachandran, Ranjith K.; Clemmen, Stephane; Baets, Roel; Barry, Sean Y.; Detavenier, Christophe; Dendooven, Jolien

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Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

Date

2019

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Van Daele, Michiel

;

Griffiths, Matthew B.E.

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Ramachandran, Ranjith K.

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Clemmen, Stephane

;

Baets, Roel

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Barry, Sean Y.

;

Detavenier, Christophe

;

Dendooven, Jolien

Journal

ACS Applied Materials & Interfaces

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Plasma-enhanced atomic layer deposition of nanostructured gold near room temperature

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