Publication:
Pushing PVD to the limits - recent advances
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-16T05:44:12Z | |
| dc.date.available | 2021-10-16T05:44:12Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11323 | |
| dc.source.beginpage | 61 | |
| dc.source.book | Materials for Information Technology. Devices, Interconnects and Packaging | |
| dc.source.endpage | 68 | |
| dc.title | Pushing PVD to the limits - recent advances | |
| dc.type | Book chapter | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |