Publication:

The etching behavior of tungsten (w) with respect to the orientation of the grain boudnary and masking layers

Date

1997

Presentation

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Author(s)

Vanhaelemeersch, Serge

;

Van den hove, Luc

;

Lee, Hean-Cheal

Statistics

1960 since deposited on 2021-09-30

Acq. date: 2026-01-26