Publication:

The etching behavior of tungsten (w) with respect to the orientation of the grain boudnary and masking layers

Date

1997
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Author(s)

Vanhaelemeersch, Serge  
;
Van den hove, Luc  
;
Lee, Hean-Cheal

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1963 since deposited on 2021-09-30
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1963 since deposited on 2021-09-30
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Acq. date: 2026-04-27

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