Publication:

Ternary rare-earth metal oxide high-k layers on silicon oxide

Date

2005-03
Journal article
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dc.contributor.authorZhao, Chao
dc.contributor.authorWitters, Thomas
dc.contributor.authorBrijs, Bert
dc.contributor.authorBender, Hugo
dc.contributor.authorRichard, Olivier
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeeg, T.
dc.contributor.authorSchubert, J.
dc.contributor.authorAfanasiev, Valeri
dc.contributor.authorStesmans, Andre
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorAfanasiev, Valeri
dc.contributor.imecauthorStesmans, Andre
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.date.accessioned2021-10-16T07:29:35Z
dc.date.available2021-10-16T07:29:35Z
dc.date.issued2005-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11609
dc.source.beginpage132903-1
dc.source.endpage132903-3
dc.source.issue13
dc.source.journalApplied Physics Letters
dc.source.volume86
dc.title

Ternary rare-earth metal oxide high-k layers on silicon oxide

dc.typeJournal article
dspace.entity.typePublication
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