Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Use of X-ray techniques in the development and production of novel transistor structures
Publication:
Use of X-ray techniques in the development and production of novel transistor structures
Date
2014
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
29287.pdf
1.1 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hikavyy, Andriy
;
Rosseel, Erik
;
Witters, Liesbeth
;
Mertens, Hans
;
Ryan, Paul
;
Langer, Robert
;
Loo, Roger
Journal
Abstract
Description
Metrics
Downloads
1
since deposited on 2021-10-22
Acq. date: 2025-10-24
Views
1923
since deposited on 2021-10-22
401
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Downloads
1
since deposited on 2021-10-22
Acq. date: 2025-10-24
Views
1923
since deposited on 2021-10-22
401
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations