Publication:
Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication
| dc.contributor.author | Okudur, Oguzhan Orkut | |
| dc.contributor.author | Gonzalez, Mario | |
| dc.contributor.author | Van den Bosch, Geert | |
| dc.contributor.author | Rosmeulen, Maarten | |
| dc.contributor.imecauthor | Okudur, Oguzhan Orkut | |
| dc.contributor.imecauthor | Gonzalez, Mario | |
| dc.contributor.imecauthor | Van den Bosch, Geert | |
| dc.contributor.imecauthor | Rosmeulen, Maarten | |
| dc.contributor.orcidimec | Okudur, Oguzhan Orkut::0000-0002-4790-7772 | |
| dc.contributor.orcidimec | Gonzalez, Mario::0000-0003-4374-4854 | |
| dc.contributor.orcidimec | Van den Bosch, Geert::0000-0001-9971-6954 | |
| dc.contributor.orcidimec | Rosmeulen, Maarten::0000-0002-3663-7439 | |
| dc.date.accessioned | 2023-08-02T10:06:36Z | |
| dc.date.available | 2023-06-25T20:34:40Z | |
| dc.date.available | 2023-07-11T06:35:01Z | |
| dc.date.available | 2023-08-02T10:06:36Z | |
| dc.date.issued | 2023 | |
| dc.description.wosFundingText | This work was supported by imec's Industrial Affiliation Program on Storage Memory devices. | |
| dc.identifier.doi | 10.1016/j.microrel.2023.114996 | |
| dc.identifier.issn | 0026-2714 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/42086 | |
| dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | |
| dc.source.beginpage | Art. 114996 | |
| dc.source.endpage | na | |
| dc.source.issue | June | |
| dc.source.journal | MICROELECTRONICS RELIABILITY | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 145 | |
| dc.title | Scaling-friendly approaches to minimize the magnitude and asymmetry of wafer warpage during 3-D NAND fabrication | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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