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ALD La-based oxides for Vt-tuning in high-k/metal gate stacks
Publication:
ALD La-based oxides for Vt-tuning in high-k/metal gate stacks
Date
2007
Proceedings Paper
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15422.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Swerts, Johan
;
Fedorenko, Yanina
;
Maes, Jan
;
Tois, E.
;
Delabie, Annelies
;
Ragnarsson, Lars-Ake
;
Yu, HongYu
;
Nyns, Laura
;
Adelmann, Christoph
;
Van Elshocht, Sven
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Views
1960
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1960
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations