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ALD La-based oxides for Vt-tuning in high-k/metal gate stacks
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1962 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
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Metrics
Views
1962 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
Citations