Publication:

ALD La-based oxides for Vt-tuning in high-k/metal gate stacks

Date

2007

Proceedings Paper

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Files

15422.pdf 292.27 KB

Author(s)

;

Fedorenko, Yanina

;

;

;

Delabie, Annelies

;

Ragnarsson, Lars-Ake

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;

;

Adelmann, Christoph

;

Van Elshocht, Sven

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Acq. date: 2026-03-19