Publication:
Strained silicon-on-insulator : fabrication and characterization
Date
| dc.contributor.author | Reiche, M. | |
| dc.contributor.author | Himcinschi, C. | |
| dc.contributor.author | Goesele, U. | |
| dc.contributor.author | Christiansen, S. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Buca, D. | |
| dc.contributor.author | Zhao, Q. T. | |
| dc.contributor.author | Feste, S. | |
| dc.contributor.author | Loo, Roger | |
| dc.contributor.author | Nguyen, Duy | |
| dc.contributor.author | Buchholtz, W. | |
| dc.contributor.author | Wei, A. | |
| dc.contributor.author | Horstmann, D. | |
| dc.contributor.author | Feijoo, D. | |
| dc.contributor.author | Storck, P. | |
| dc.contributor.imecauthor | Loo, Roger | |
| dc.contributor.orcidimec | Loo, Roger::0000-0003-3513-6058 | |
| dc.date.accessioned | 2021-10-16T19:00:21Z | |
| dc.date.available | 2021-10-16T19:00:21Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12773 | |
| dc.identifier.url | http://www.ecsdl.org/getabs/servlet/GetabsServlet?prog=normal&id=ECSTF8000006000004000339000001&idtype=cvips&gifs=Yes | |
| dc.source.beginpage | 339 | |
| dc.source.conference | Silicon-on-Insulator Technology and Devices 13 | |
| dc.source.conferencedate | 6/05/2007 | |
| dc.source.conferencelocation | Chicago, IL USA | |
| dc.source.endpage | 344 | |
| dc.title | Strained silicon-on-insulator : fabrication and characterization | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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