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High performance Si0.45Ge0.55 implant free quantum well pFET with enhanced mobility by low temperature process and transverse strain relaxation
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High performance Si0.45Ge0.55 implant free quantum well pFET with enhanced mobility by low temperature process and transverse strain relaxation
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Date
2014-12
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30187.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Yamaguchi, Shimpei
;
Witters, Liesbeth
;
Mitard, Jerome
;
Eneman, Geert
;
Hellings, Geert
;
Hikavyy, Andriy
;
Loo, Roger
;
Horiguchi, Naoto
Journal
IEEE Transactions on Electron Devices
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Views
1866
since deposited on 2021-10-22
3
last month
3
last week
Acq. date: 2025-12-15
Citations