Publication:
Barrier integrity and reliablility in copper low-k interconnects
Date
| dc.contributor.author | Tokei, Zsolt | |
| dc.contributor.imecauthor | Tokei, Zsolt | |
| dc.date.accessioned | 2021-10-16T05:43:54Z | |
| dc.date.available | 2021-10-16T05:43:54Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11322 | |
| dc.source.beginpage | 386 | |
| dc.source.conference | International Semiconductor Technology Conference - ISTC | |
| dc.source.conferencedate | 15/03/2005 | |
| dc.source.conferencelocation | Shangai China | |
| dc.source.endpage | 395 | |
| dc.title | Barrier integrity and reliablility in copper low-k interconnects | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |