Publication:
The mechanism of low-k SiOCH film modification by oxygen atoms
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1904 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations
Metrics
Views
1904 since deposited on 2021-10-18
Acq. date: 2025-10-23
Citations